Piezo Stages
Piezo Stages
Mainly based on the APA® concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers’ requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA® concept offering a reliable, robust, precise and compact solution to its users. The Commercially Of The Shelves (COTS) Solutions for X, XY & XYZ stages are presented below. A dedicated brochure “XY stages Heritage” presents the customized and OEM XY stages solutions already delivered by CTEC to the Space, Electro-Optic & Scientific Instrumentation markets.
- X piezo stages: single axis piezo stages take advantage from the characteristics of APA® actuators and flexure guiding to offer excellent compactness, robustness, bandwidth and resolution,
- XY piezo stages: the two axis stages can be equipped with strain gauges for very fine positioning or closed loop control,
- XYZ piezo stages: two axis stages can receive athird motion axis for three degrees freedom.
Piezoelectric stage - X60S
Piezoelectric stage - X120S
Piezoelectric stage - XY200M
The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
PERFORMANCES
| Max No-load displacement | 200 µm |
| Dimensions | 100*100*22 mm |
| Unloaded resonance frequency | 580 Hz |
| Response time | 0.86 ms |
Piezoelectric stage - XYZ200M
The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
PERFORMANCES
| Max No-load displacement | 200 µm |
| Dimensions | 100*100*49 mm |
| Unloaded resonance frequency | 380 Hz |
| Response time | 1.32 ms |
Piezoelectric stage - XY25XS
The piezoelectric stage XY25XS is based on the APA 25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, micro scanning.
PERFORMANCES
| Max No-load displacement | 25 µm |
| Dimensions | 50*50*19 mm |
| Unloaded resonance frequency | 3000 Hz |
| Response time | 0.17 ms |